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  5. 2D Semiconductor Wafer/Chip Defect Inspection

2D Semiconductor Wafer/Chip Defect Inspection

Inspection Defect Types

Defect Type
1
Front scratch, back scratch, crack, wrinkle
2
Particle
3
Smudges, discoloration, fingerprints
4
Edge chipping, chipping
5
Bubbles, holes, pits
6
Foreign bodies, white spots, black spots
7
warped
8
Imprints, uneven grinding
9
Broken lines, pattern translocation
10
Customized defect inspection and definition