- Automatic switching of multi-magnification microscopic detection system
- Nanoscale Auto Focus System
- Large-size wafer alignment system (Multi-View)
- Recipe offline setting function
- Multi-Thread image comparison algorithm system
- Visual measurement system by using image measurement method to detect key dimension
- Support CAD file import
- Automatic calibration and inspection system
- Customized report output
- Fast loading and unloading (<10sec)
- Defect detection categories:
