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  5. Wafer Defects Inspection System

Wafer Defects Inspection System

  • Automatic switching of multi-magnification microscopic detection system
  • Nanoscale Auto Focus System
  • Large-size wafer alignment system (Multi-View)
  • Recipe offline setting function
  • Multi-Thread image comparison algorithm system
  • Visual measurement system by using image measurement method to detect key dimension
  • Support CAD file import
  • Automatic calibration and inspection system
  • Customized report output
  • Fast loading and unloading (<10sec)
  • Defect detection categories: